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What are the critical roles of high-precision springs in semiconductor equipment?

Key Applications:

  • Photolithography Mask Stage Buffer Springs
    (Nanometer-level vibration control)

  • Vacuum Robotic Arm Contact Springs
    (Particle-contamination-proof design)

Special Requirements:

  • Non-magnetization Treatment (Relative permeability μ ≤ 1.01)

  • Ultra-clean Packaging (Class 1000 Cleanroom Standard)